Laser distance interferometers have been playing key roles for the advance of precision machines for large-volume manufacture of nanotechnology-based products such as semiconductor integrated circuits ...
White light interferometry (WLI) is a contact-free optical method for measuring surface height. It uses the phase difference between the light reflected off a reference mirror and the target sample to ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results